VeraSpec Atmospheric Pressure Ionization Mass Spectrometer (APIMS) 

Real-Time, Multi-Species Monitoring for All Critical Impurities in Bulk Electronic Gases

The Extrel VeraSpec Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

Key advantages for contamination control in the UHP gases:

  • Real-time, multi-species monitoring for critical impurities including O2, H2O, CH4, CO, CO2, NH3 and more
  • Well-established, powerful mass spectrometry technology
  • Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration, combining both electron impact and atmospheric pressure ionization sources
  • Easy to use with integrated user interface for efficient operation, point-of-use visual indicators on gas purity, and scheduled automated calibrations                       
  • Lowest detection limits and highest flexibility compared to other technologies
  • Ultra-high precision and long-term stability
  • Fast measurement speed
  • Extremely low maintenance requirements
  • Proprietary, fully customizable, automated process control software
  • Multi-port sample selector options available
  • Industry-best customer support and applications team

Low Maintenance

  • Dual ion source for convenience of diagnostics
  • Heated API ion source
  • Built-in software calibration procedures
  • Oil-free pumping system
  • <1/year maintenance frequency
  • Low calibration frequency

Questions? We’re here to help.

Extrel CMS, LLC 
575 Epsilon Drive
Pittsburgh, PA 15238

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