VeraSpec APIMS

VeraSpec Atmospheric Pressure Ionization Mass Spectrometer (APIMS) 

Real-Time, Multi-Species Monitoring for All Critical Impurities in Bulk Electronic Gases

The Extrel VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

Key advantages for contamination control in the UHP gases:

  • Real-time, multi-species monitoring for critical impurities including O2, H2O, CH4, CO, CO2, NH3 and more
  • Well-established, powerful mass spectrometry technology
  • Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration, combining both electron impact and atmospheric pressure ionization sources
  • Easy to use with integrated user interface for efficient operation, point-of-use visual indicators on gas purity, and scheduled automated calibrations                       
  • Lowest detection limits and highest flexibility compared to other technologies
  • Ultra-high precision and long-term stability
  • Fast measurement speed
  • Extremely low maintenance requirements
  • Proprietary, fully customizable, automated process control software
  • Multi-port sample selector options available
  • Industry-best customer support and applications team

continuous monitoring of bulk gas purity TO ensure maximum production

  • Low Maintenance
  • Dual ion source for convenience of diagnostics
  • Heated API ion source
  • Built-in software calibration procedures
  • Oil-free pumping system
  • <1/year maintenance frequency
  • Low calibration frequency
  • Low cost of ownership
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APPLICATIONS

  • Air Separation Unit
  • Bulk Gas Storage
  • Fabrication Environment
  • Process Tools
  • Semiconductor Bulk Gas Purity Verification

Our Mass Spec Gas Analysis Solutions

VeraSpec™ APIMS

Quadrupole Mass Spectrometer for Lab, Research & High Purity Applications
VeraSpec™ APIMS

MAX300-RTG™ 2.0

Real-Time Industrial Quadrupole Mass Spectrometer Gas Analyzer
MAX300-RTG™ 2.0

MAX300-AIR™

Environmental Quadrupole Mass Spectrometer Gas Analyzer
MAX300-AIR™

MAX300-BIO™

Bioreactor Quadrupole Mass Spectrometer Gas Analyzer
MAX300-BIO™

MAX100-BTU™

Real-Time Heating Value Quadrupole Mass Spec Gas Analyzer
MAX100-BTU™

MAX300-LG™

High-Performance Quadrupole Laboratory Mass Spec Gas Analyzer
MAX300-LG™

MAX300-EGA™

Evolved Laboratory Quadrupole Mass Spec Gas Analyzer
MAX300-EGA™

MAX300-CAT™

Laboratory Quadrupole Mass Spectrometer Gas Analyzer
MAX300-CAT™

VeraSpec™ HRQ

Mass Spec System

MGA™ 1200CS

Cybersecure Mass Spectrometer Gas Analyzer
MGA™ 1200CS

MGA™ 1200EC

Mass Spectrometer Gas Analyzer
MGA™ 1200EC

Questions? We’re here to help.

Extrel CMS
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USA

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