The Extrel Atmospheric Pressure Ionization Mass Spectrometer (APIMS) was designed to have reliable and repeatable low parts per trillion detection limits for gas contaminates. The VeraSpec™ APIMS has been the first choice for ultra high purity (UHP) gas contamination analysis and trace pollution studies for over twenty-five years.
The VeraSpec™ APIMS is designed around our high transmission 19 mm quadrupole mass filter and combined with our proven DC Corona Discharge source for maximum sensitivity. It is available with various mass ranges from 1 to 4000 amu to fit your application. Trace level analysis of impurities in pure gases is a critical capability in the development and implementation of semi-conductor and other high technology industrial applications.
Atmospheric Pressure Ionization Mass Spectrometry (API-MS) has developed into a critical tool for pure gas analysis, providing part-per-trillion (ppt) level detection of certain impurities in pure gases. For other impurities for which API is not a viable technique, electron impact ionization (EI) mass spectrometry can be used to supplement the analysis. In some cases, membrane introduction mass spectrometry (MIMS) with an EI source can provide sub part-per-billion (ppb) detection limits for some components. Extrel’s VeraSpec APIMS has the unique capability to combine these techniques in a single instrument.