VeraSpec APIMS

VeraSpec  Atmospheric Pressure Ionization Mass Spectrometer (APIMS)

The Extrel Atmospheric Pressure Ionization Mass Spectrometer (APIMS) was designed to have reliable and repeatable low parts per trillion detection limits for gas contaminates.  The VeraSpec APIMS has been the first choice for ultra high purity (UHP) gas contamination analysis and trace pollution studies for over twenty-five years.

The VeraSpec APIMS is designed around our high transmission 19 mm quadrupole mass filter and combined with our proven DC Corona Discharge source for maximum sensitivity. It is available with various mass ranges from 1 to 4000 amu to fit your application. Trace level analysis of impurities in pure gases is a critical capability in the development and implementation of semi-conductor and other high technology industrial applications.

Atmospheric Pressure Ionization Mass Spectrometry (API-MS) has developed into a critical tool for pure gas analysis, providing part-per-trillion (ppt) level detection of certain impurities in pure gases. For other impurities for which API is not a viable technique, electron impact ionization (EI) mass spectrometry can be used to supplement the analysis. In some cases, membrane introduction mass spectrometry (MIMS) with an EI source can provide sub part-per-billion (ppb) detection limits for some components. Extrel’s VeraSpec APIMS has the unique capability to combine these techniques in a single instrument.


Detection Limits

  • 5 ppt Oxygen and Nitrogen 
  • 5 ppt H2O in Nitrogen 
  • 5 ppt CO2 in Nitrogen 

Mass Range

  • 1-500 amu; other mass ranges available upon request 
  • Better than +/- 0.1 amu after thermal equilibrium 
  • Long-term stability +/- 0.01 amu 
Ionization Source
  • Corona discharge with additional EI filament 
Mass Filter
  • Single 19 mm (3/4”) diameter rod tri-filter quadrupole or Triple tri-filter quadrupole mass filter available for MS/MS 
  • Positive and negative ions using electron multiplier with continuous dynode 
  • Continuous monitoring of up to 20 masses or mass windows. Additional masses or mass ranges can be added using easy-to-write Macros 
Data System
  • Merlin Automation Data System Software with Windows 7 or 10 compatibility 
Vacuum System
  • Deferentially pumped using turbomolecular drag pumps backed by oil rough pump; dry diaphragm backing pump optional 
Power Requirements
  • 115 Vac, 50/60 Hz, two 20 A circuits; optional 220 VAC version

Questions? We’re here to help.

Extrel CMS, LLC 
575 Epsilon Drive
Pittsburgh, PA 15238