MOLECULAR BEAM & PLASMA ANALYSIS SYSTEM

Quadrupole Mass Spectrometer System

Molecular Beam and Plasma Analysis System

The EXTREL™ VeraSpec™ Molecular Beam Mass Spectrometry (MBx™) systems are designed for stable, accurate, and high sensitivity analysis of processes from 10^-4 Torr up to and above atmospheric pressure. The systems include a full quadrupole mass spectrometer system, equipped with complete software, sampling system, and sampling orifice(s). The low noise right angle design can provide energy analysis as well as mass analysis. Our Molecular Beam Systems and Plasma Analysis Systems are available in mass ranges from 0.5 – 50 Da to 20 – 14,000 Da and offer a wide range of options. The VeraSpec Molecular Beam Systems use MAX Series Mass Spectrometers. These products are available in a number of configurations, including Sampling Chambers and Mass Spectrometer only or as complete systems that include the vacuum systems and mounting rack. The MAX can also be integrated with existing systems to suit customer needs.

APPLICATIONS

The VeraSpec Molecular Beam Mass Spectrometry System (MBMS) is a highly sensitive and versatile instrument that is used for gas analysis in a variety of research and industrial applications. Here are some of the benefits:

High Sensitivity: Highly sensitive and can detect and analyze trace amounts of gases with a high degree of accuracy. This makes it ideal for applications where the detection and analysis of small amounts of gas are critical.
High Resolution: Provides high-resolution analysis of gases with a mass range of up to 300 atomic mass units. This allows for accurate identification and quantification of gas species, even at low concentrations.
Versatility: Is a versatile instrument that can be used in a wide range of applications, including materials science, semiconductor manufacturing, environmental monitoring, and pharmaceuticals. It can also be used to analyze gases in vacuum environments.
Real-time Monitoring: Provides real-time monitoring of gas composition, which allows for immediate feedback and adjustment of the process. This is particularly important in high-precision applications where even minor changes in gas composition can have a significant impact on performance.
Easy to Use: Is easy to use and can be operated by non-experts. It has a user-friendly interface that allows for easy data acquisition and analysis.
Compact Design: Has a compact and modular design, which makes it easy to install and integrate into existing systems. It also requires minimal maintenance, which reduces downtime and operating costs.

INDUSTRIES

The VeraSpec Molecular Beam Mass Spectrometry System is used in a variety of industries and research fields. Here are some of the industries that use the VeraSpec Molecular Beam Mass Spectrometry System:

Materials Science: Used in materials science to study the composition and properties of thin films, surfaces, and interfaces. It is used to analyze the deposition and growth of materials and to study the properties of surfaces and interfaces.
Semiconductor Manufacturing: Used in semiconductor manufacturing to monitor the gas composition in the processing environment. It is used to detect impurities and contaminants in the processing gas and to ensure that the processing conditions are optimal.
Environmental Monitoring: Used in environmental monitoring to detect and analyze pollutants and other contaminants in the atmosphere. It is used to monitor air quality and to identify sources of pollution.
Pharmaceutical Industry: Used in the pharmaceutical industry to analyze and characterize drug compounds and to study drug interactions. It is used to identify impurities in drug compounds and to study the absorption and metabolism of drugs.
Aerospace Industry: Used in the aerospace industry to study the composition of the atmosphere and to monitor the gas composition in spacecraft environments. It is used to detect and analyze gases in the atmosphere and to ensure that the spacecraft environment is safe for human occupants.

The power of mass spectrometry as an analytical technique is well known, and mass spectrometers have bene widely used for residual gas analysis. However, for samples that are not a residual gas contained in the mass spectrometer vacuum chamber, an effective sampling arrangement must be used. Molecular beam sampling is an effective way to introduce neutral gas or pre-formed ion samples over a wide range of sample conditions. Three molecular beam systems are available to suit the broadest application requirements: VeraSpec MB2, VeraSpec MB3, and VerSpec MBx. The MB2 and MB3 systems are 2- and 3-stage molecular beam inlet systems, designed for analysis of neutrals or ions from 2 mTorr up to 2 atm. These systems are ideal for plasma diagnostics, chemical vapor deposition, and other similar applications. The MBx system is a 3-stage, discreetly pumped gas analysis system for extreme samples. All systems can be modified for an even broader range of sample conditions.

VeraSpec™ MBx

The VeraSpec MBx quadrupole mass spectrometer system is a 3-stage, discreetly pumped gas analysis system designed for sampling reactive and condensable gases. The MBx is designed with a heated inlet, easily changed first aperture and skimmer, and an isolation gate valve to allow inlet maintenance for applications, which have challenging sample conditions, such as pyrolysis. The carefully engineered inlet provides a supersonic expansion of the sample into the vacuum to maintain sample integrity. This ensures accurate analysis of analytes before they react or decompose. The VeraSpec MBx is an integral part of the High Throughput Analytical Pyrolysis (HTAP) system, which was developed in collaboration among the National Renewable Energy Laboratory (NREL), Extrel, ArborGen, and Frontier Labs. The HTAP system is used to accelerate the search for new and improved biofuel sources and has shown improvement in the analysis of pyrolysis products.

VeraSpec™ MB2

Sampling from source pressures of 2 mTorr to 100 Torr
Biasable first aperture with a diameter of 100 m to 3 mm depending on source pressure

VeraSpec™ MB3

Sampling from source pressures of 100 Torr to 2 atm
Biasable first aperture or sampling tube depending on source pressure

MB2 and MB3

Cross Beam Deflector Ionizer deflects ions 90^o off-axis, separating ions from common background noise sources such as photons, metastables, particulates, and molecular beam gases.
Analog and positive ion counting
Negative ion/electron attachment option
Signal gating option (beam chopper and lock-in amplifier)
Merlin Automation Data System Software

VeraSpec™ MBx

Sampling from source pressures of 100 Torr to 2 atm
Optional to 100 atm
Heated first aperture for condensable compounds
Isolation gate valve to keep MS under vacuum during first-stage maintenance
Cross Beam Deflector Ionizer deflects ions 90^o off-axis separating ions from photons, metastables, particulates, and molecular beam gases.
This increases signal-to-noise by filtering out common and controllable causes of background noise.
Analog and positive ion counting
Negative ion/electron attachment option
Signal gating option (beam chopper and lock-in amplifier)
Merlin Automation Data System Software