Plasma Analysis Systems
Extrel’s VeraSpec™ Molecular Beam Mass Spectrometry systems are designed for stable, accurate, and high sensitivity analysis of processes from 10-4 Torr up to and above atmospheric pressure. The systems include a full quadrupole mass spectrometer system, equipped with complete software, sampling system, and sampling orifice(s). The low noise right angle design can provide energy analysis as well as mass analysis.
Extrel’s Molecular Beam Systems and Plasma Analysis Systems are available in mass ranges from 0.5 – 50 Da to 20 – 14,000 Da, and offer a wide range of options.
The VeraSpec™ Molecular Beam Systems use MAX Series Mass Spectrometers. These products are available in a number of configurations, including Sampling Chambers and Mass Spectrometer only or as complete systems that include the vacuum systems and mounting rack. The MAX can also be integrated with existing systems to suit customer needs.
The power of mass spectrometry as an analytical technique is well known, and mass spectrometers have bene widely used for residual gas analysis. However, for samples that are not a residual gas contained in the mass spectrometer vacuum chamber, an effective sampling arrangement must be used. Molecular beam sampling is an effective way to introduce neutral gas or pre-formed ion samples over a wide range of sample conditions. Three molecular beam systems are available to suit the broadest application requirements: VeraSpec MB2, VeraSpec MB3, and VerSpec MBx. The MB2 and MB3 systems are 2- and 3-stage molecular beam inlet systems, designed for analysis of neutrals or ions from 2 mTorr up to 2 atm. These systems are ideal for plasma diagnostics, chemical vapor deposition, and other similar applications. The MBx system is a 3-stage, discreetly-pumped gas analysis system for extreme samples. All systems can be modified for an even broader range of sample conditions.
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