VeraSpec Molecular Beam and Plasma Analysis Systems

Plasma Analysis Systems

Extrel’s VeraSpec™ Molecular Beam Mass Spectrometry systems are designed for stable, accurate, and high sensitivity analysis of processes from 10^-4 Torr up to and above atmospheric pressure. The systems include a full quadrupole mass spectrometer system, equipped with complete software, sampling system, and sampling orifice(s). The low noise right angle design can provide energy analysis as well as mass analysis.

Extrel’s Molecular Beam Systems and Plasma Analysis Systems are available in mass ranges from 0.5 – 50 Da to 20 – 14,000 Da, and offer a wide range of options.

The VeraSpec™ Molecular Beam Systems use MAX Series Mass Spectrometers. These products are available in a number of configurations, including Sampling Chambers and Mass Spectrometer only or as complete systems that include the vacuum systems and mounting rack. The MAX can also be integrated with existing systems to suit customer needs.

The power of mass spectrometry as an analytical technique is well known, and mass spectrometers have bene widely used for residual gas analysis. However, for samples that are not a residual gas contained in the mass spectrometer vacuum chamber, an effective sampling arrangement must be used. Molecular beam sampling is an effective way to introduce neutral gas or pre-formed ion samples over a wide range of sample conditions. Three molecular beam systems are available to suit the broadest application requirements: VeraSpec MB2, VeraSpec MB3, and VerSpec MBx. The MB2 and MB3 systems are 2- and 3-stage molecular beam inlet systems, designed for analysis of neutrals or ions from 2 mTorr up to 2 atm. These systems are ideal for plasma diagnostics, chemical vapor deposition, and other similar applications. The MBx system is a 3-stage, discreetly-pumped gas analysis system for extreme samples. All systems can be modified for an even broader range of sample conditions.

VeraSpec™ MBx

Extrel’s VeraSpec MBx quadrupole mass spectrometer system is a 3-stage, discreetly-pumped gas analysis system designed for sampling reactive and condensable gases. The MBx is designed with a heated inlet, easily-changed first aperture and skimmer, and an isolation gate valve to allow inlet maintenance for applications, which have challenging sample conditions, such as pyrolysis. The carefully-engineered inlet provides a supersonic expansion of the sample into the vacuum to maintain sample integrity. This ensures accurate analysis of analytes before they react or decompose. The VeraSpec MBx is an integral part of the High Throughput Analytical Pyrolysis (HTAP) system, which was developed in collaboration among the National Renewable Energy Laboratory (NREL), Extrel, ArborGen, and Frontier Labs. The HTAP system is used to accelerate the search for new and improved biofuel sources, and has shown improvement in the analysis of pyrolysis products.

These products are the analysis systems of choice for applications such as:

Atmospheric Chemistry Research
Biomaterial Research
Chemical Vapor Deposition (CVD)
Clusters and Nanoparticle Research
Combustion Studies
Flow Tube and Drift Cell Detection
Nanospray / Electrospray Ionization (ESI) Detection
Plasma Etch
Pulsed laser Deposition

System Highlights:

VeraSpec™ MB2

Sampling from source pressures of 2 mTorr to 100 Torr
Biasable first aperture with a diameter of 100 m to 3 mm depending on source pressure

VeraSpec™ MB3

Sampling from source pressures of 100 Torr to 2 atm
Biasable first aperture or sampling tube depending on source pressure

MB2 and MB3

Cross Beam Deflector Ionizer deflects ions 90^o off-axis, separating ions from common background noise sources such as photons, metastables, particulates, and molecular beam gases.
Analog and positive ion counting
Negative ion/electron attachement option
Signal gating option (beam chopper and lock-in amplifier)
Merlin Automation Data System Software

VeraSpec™ MBx

Sampling from source pressures of 100 Torr to 2 atm
Optional to 100 atm
Heated first aperture for condensable compounds
Isolation gate valve to keep MS under vacuum during first-stage maintenance
Cross Beam Deflector Ionizer deflects ions 90^o off-axis separating ions from photons, metastables, particulates, and molecular beam gases.
This increases signal-to-noise by filtering out common and controllable causes of background noise.
Analog and positive ion counting
Negative ion/electron attachment option
Signal gating option (beam chopper and lock-in amplifier)
Merlin Automation Data System Software

SYSTEM SPECS

Recommended Power Supply

(3) 120 VAC, 50/60 Hz, 20 Amp circuit
(3) 220 VAC, 50/60 Hz, 20 Amp circuit

Ambient Temperature

55^o F to 80^o F (13^o C to 27^o C)

Relative Humidity

0-90% non-condensing

Area Classification

Laboratory/General Purpose

Analyzer Weight

450-480 lbs (200 to 225 kg)

Analyzer Dimensions

Height: 77” (196 cm) Depth: 30” (76 cm) Width: 30” (76 cm)

Merlin Automation Data System Software Control Unit

Information and control are transmitted and displayed via USB or CAT5E to a PC with Microsoft Windows 7 or 10 operating system.

Analysis Mode

Scan Mode, Single Ion Monitoring (SIM), Multiple Reaction Monitoring (MRM)

Analysis Rate

Maximum 80 microseconds per point in Scan Mode, typically 5 milliseconds per ion in SIM

Number of Ions

Up to 72 ions with 20 scan segments

Analog Inputs/Outputs

10 or 20 channel 12 bit 0 to 10 V or -10 V to +10 V

Outputs

6 differential analog inputs 12 bit -10 V to +10 V

Digital Inputs/Outputs

8 Inputs 8 Outputs 16 user-selectable input/outputs (all I/Os 1 bit TTL)

Extrel Communications

Some communications are supported; please contact your Extrel representative for additional information.

System Highlights

Sampling from source pressures of 100 Torr to 2 atm
Optional to 100 atm
Heated first aperture for condensable compounds
Isolation gate valve to keep MS under vacuum during first-stage maintenance
Cross Beam Deflector Ionizer deflects ions 90^o off-axis separating ions from photons, metastables, particulates, and molecular beam gases.
- This increases signal-to-noise by filtering out common and controllable causes of background noise.
Analog and positive ion counting
Negative ion/electron attachment option
Signal gating option (beam chopper and lock-in amplifier)
Merlin Automation Data System Software

Molecular Beam

Plasma Analysis Systems

SYSTEM SPECS

Documentation

Product Notes

Publications

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