Scrubber / Burn Box Efficiency

Scrubber / Burn Box Efficiency

For Semiconductor producers, the monitoring of the Destruction and Removal Efficiency (DRE) of Hazardous Air Pollutants (HAPs) and Greenhouse Gases has become increasingly important as laws (driven by public awareness and global agreements such as the Kyoto Protocol) and local pollution regulations have been significantly tightened. These strict standards often include increased penalties for emissions of a wide range of compounds including HAPs, halogenated volatile organic compounds (HVOCs), greenhouse gases, lead, and germanium. One way in which Extrel’s Mass Spectrometer systems are used to aid the effort to reduce emissions and ensure compliance with applicable regulations is to monitor the efficiency of abatement systems. Analysis allows for efficient development and monitoring of systems such as Scrubber Burn Boxes used for the abatement of combustible gases.

Extrel provides various High Sensitivity Mass Spectrometers and Residual Gas Analysis Systems to meet these needs.

Extrel’s Flange Mounted Mass Spectrometers offer high sensitivity and resolution with a variety of mass ranges to fit your needs. MAX300-IG™ Process Gas Analysis Mass Spectrometer and MAX300-LG™ Laboratory Gas Analysis Mass Spectrometers offer analysis from 100% down to 10 parts per billion (ppb) with unmatched accuracy and repeatability.

System Specs

Product Specifications include:

  • High Sensitivity to 6 mA/Torr
  • High Resolution to 110 M at m/z 28
  • Partial Pressure Detectability to 10-16 mbar
  • Detection Limits from 10 ppb to 100%
  • Various Mass ranges from 2-250 and 2-1000 amu
  • Positive and Negative Ion Detection
  • Corrosive and Hazardous Gas Packages
  • Sampling from Multiple locations

Extrel has been the worldwide leading supplier of Mass Spectrometers and Residual Gas Analyzers for over 45 years.

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