Gas Purity

Semiconductor, gas suppliers and optical componentExtrel APIMS with Touchscreen processing requires gas analysis to detect impurities in gases used for the production process. Other industries, such as steel and pharmaceutical manufacturing, require confirmation of correct gas mixtures for various processes. Extrel offers instruments with dynamic range and low parts per billion (ppb) and parts per trillion (ppt) detection limits to meet Gas Purity and continuous atmosphere analysis needs.

Extrel MAX300 Series Gas Analysis Systems are the chosen products for gas purity applications with ppb detection limits. The VeraSpec APIMS takes the analytical capability of a number of Extrel’s best technologies for trace gas analysis, and makes them available in one instrument, including Atmospheric Pressure Ionization MS (APIMS), high sensitivity closed source electron impact ionization (EI), and membrane inlet mass spectrometry (MIMS). The DC Corona Discharge Source is a chemical or soft ionization source that is ideal for monitoring molecules in the low ppt range. To make the system a more comprehensive research tool, the system can be configured with MS/MS capability providing the ability to positively identify components by looking at daughter ions. 

System Specs

  • Detection limits from 10 ppt – 100% 
  • Various mass ranges from 0.5 – 50 up to 10 – 4000 amu
  • Refer to MAX-QMS product note for mass range options
  • Positive and negative ion detection 
  • Corrosive and hazardous gas packages


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Extrel CMS, LLC 
575 Epsilon Drive
Pittsburgh, PA 15238

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