Semiconductor

Semiconductor Fab Gas Verification Applications

Mass spectrometry has long been a key technique in the development and production of semiconductors.

The Semiconductor market requires:

  • Use of high purity materials
  • Tight control of the process
  • Use of an analysis and control system with high sensitivity and resolution to adapt to chemistry changes
  • High stability and repeatability of analytical techniques

Ideal for gas purity, the Extrel VeraSpec APIMS combines Atmospheric Pressure Ionization (API) technology with a high performance mass spectrometer optimized over five decades in industrial gas analysis. It provides ease-of-use to continuously monitor Nitrogen, Argon, Helium, Oxygen, and Hydrogen supply streams and rapidly report ppt-level contamination to protect.  

semiconductor

Gas Purity

semiconductor Vacuum Ultra Violet (VUV) Lithography

Lithography

Molecular Beam Epitaxy (MBE) semiconductor

MBE Monitoring

semiconductor

Plasma and CVD Process Monitoring

semiconductor

Scrubber & Burn Box Efficiency

Process Insights_Extrel VeraSpec APIMS

OUR GLOBAL SOLUTIONS DELIVER

  • Improved reliability
  • Low cost of ownership 
  • Meet compliance requirements
  • Backed by global service and support

SERVICE | SALES | TRAINING

Americas +1 412.963.7530 
EMEA +49 69 20436910
China/APAC +86 400 086 0106


VeraSpec™ APIMS

Quadrupole Mass Spectrometer for Lab, Research & High Purity Applications
VeraSpec™ APIMS

MAX300-LG™

High-Performance Quadrupole Laboratory Mass Spec Gas Analyzer
MAX300-LG™

MAX300-CAT™

Laboratory Quadrupole Mass Spectrometer Gas Analyzer
MAX300-CAT™

Questions? We’re here to help.

Extrel CMS
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USA

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