Mass spectrometry has long been a key technique in the development and production of semiconductors.

The Semiconductor market requires:

• Use of high purity materials
• Tight control of the process
• Use of an analysis and control system with high sensitivity and resolution to adapt to chemistry changes
• High stability and repeatability of analytical techniques

Ideal for gas purity, the Extrel VeraSpec APIMS combines Atmospheric Pressure Ionization (API) technology with a high performance mass spectrometer optimized over five decades in industrial gas analysis. It provides ease-of-use to continuously monitor Nitrogen, Argon, Helium, Oxygen, and Hydrogen supply streams and rapidly report ppt-level contamination to protect.