Residual Gas Analyzers
Residual Gas Analysis
Residual Gas Analyzers (RGA), used to identify gases that are present in vacuum environments, operate in research laboratories and industrial processing facilities worldwide.
Extrel offers three levels of RGA systems. From the Extrel RGA, a small-form inexpensive traditional RGA system, to the MAX-LT, a medium sized RGA system meant for existing chambers providing higher mass range and sensitivity, and finally to our MAX Systems, which offer high sensitivity and resolution, and provide a variety of mass ranges to fit your needs. Our MAX-QMS Series is capable of detection limits of 10 parts per billion (ppb) to 100%, with unmatched accuracy and repeatability while sampling from atmospheric pressure.
Extrel’s Residual Gas Analyzers and Mass Spectrometers are used to:
Extrel’s product line for Gas Analysis applications include:
Specifications of the MAX Series include: