Products - Gas Analysis Systems

VeraSpec Trace System

The Extrel Atmospheric Pressure Ionization Mass Spectrometer (APIMS) was designed to have reliable, repeatable low parts per trillion detection limits for gas contaminates. The VeraSpec Trace system has been the first choice for ultra high purity (UHP) gas contamination analysis and trace pollution studies for over twenty-five years.

The VeraSpec™ Trace is designed around our high transmission 19 mm quadrupole mass filter and combined with our proven DC Corona Discharge source for maximum sensitivity. It is available with various mass ranges from 1 to 4000 amu to fit your application.

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Trace level analysis of impurities in pure gases is a critical capability in the development and implementation of semi-conductor and other high technology industrial applications. Atmospheric Pressure Ionization Mass Spectrometry (API-MS) has developed into a critical tool for pure gas analysis, providing part-per-trillion (ppt) level detection of certain impurities in pure gases. For other impurities for which API is not a viable technique, electron impact ionization (EI) mass spectrometry can be used to supplement the analysis. In some cases, membrane introduction mass spectrometry (MIMS) with an EI source can provide sub part-per-billion (ppb) detection limits for some components. Extrel’s VeraSpec Trace has the unique capability to combine these techniques in a single instrument.

The VeraSpec Trace system provides the ideal ionization techniques for pure gas analysis in one system. The system can be configured for both ionization techniques, eliminating the need for two mass spectrometers, and significantly reducing the overall expense. The base system utilizes either Extrel’s high-performance, closed-source EI ionizer, or the proven, reliable DC Corona Discharge API source. The DC Corona Discharge Source is a chemical or soft ionization source that is ideal for monitoring molecules in the ppb and ppt range. The EI system is taken from Extrel’s MAX300 industrial mass spectrometers, and has the same proven performance available on those systems with detection limits in the low ppb range. The system utilizes a 19 mm trifilter quadrupole, and is available in several mass ranges. The system is also offered in an MS/MS configuration, the VeraSpec Trace MS/ MS. 

The VeraSpec Trace DS is the dual-source model with both an API and Extrel’s decidedly capable closed source EI ionizer with a capillary inlet in the standard configuration. 

Source selection is accomplished using Extrel’s large ion bender for maximum flexibility and sensitivity. Adding a membrane inlet to the EI system pushes the detection limites for applicable analytes into the sub-ppb range in the VeraSpec Trace DS-MIMS system. 

Dual Source Performance 

One of the most innovative capabilities of the VeraSpec Trace is found in the dual source version. While API ionization allows for high ion currents resulting in low detection limits, the technique is limited to molecules whose ionization energy is less than that of the balance gas or any other component at a high concentration, and which have sufficient proton affinity to be ionized. As a result, every table of lower detection limits for pure gas analysis using API has gaps for components that cannot be measured. With the VeraSpec Trace DS, the gaps are filled. 

The addition of a high-performance, closed EI source delivers detection to ppb levels. With the membrane inlet, analytes can be preconcentrated, allowing for sub-ppt levels to be achieved. The VeraSpec Trace draws from the strength of both Extrel’s research and industrial experience. Membrane inlets work by allowing the VOCs to permeate through the membrane while the water or other liquid phase flows past. The result is an instrument with exceptional detection limits for all required components, with the stability and reliability required in an industrial setting. In addition, it has unprecendented flexibility and capability for trace analysis in one instrument.

 Detection Limits:
5 ppt Oxygen and Nitrogen 
5 ppt H2O in Nitrogen 
5 ppt CO2 in Nitrogen 

Mass Range: 
1-500 amu; other mass ranges available upon request 

Stability: 
Better than +/- 0.1 amu after thermal equilibrium 
Long-term stability +/- 0.01 amu 

Ionization Source: 
Corona discharge with additional EI filament 

Mass Filter: 
Single 19 mm (3/4”) diameter rod tri-filter quadrupole or Triple trifilter quadrupole mass filter available for MS/MS 

Detection: 
Positive and negative ions using electron multiplier with continuous dynode 

Masses: 
Continuous monitoring of up to 20 masses or mass windows. Additional masses or mass ranges can be added using easy-to-write Macros 

Data System: 
Merlin Automation Data System Software with Windows 7 or 10 compatibiltiy 

Vacuum System: 
Differentially pumped using turbomolecular drag pumps backed by oil rough pump; dry diaphragm backing pump optional 

Power Requirements: 
115 Vac, 50/60 Hz, two 20 A circuits; optional 220 VAC version

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