Applications - Materials Research

Secondary Ion Mass Spectrometry

Secondary Ion Mass Spectrometry (SIMS) is used to detect and characterize trace elements at or near the surface of a solid or thin film allowing researchers to understand the chemical composition of the surface. 

This surface science technique requires the use of systems with very high sensitivity and the ability to perform high resolution energy analysis. SIMS is useful for a wide variety of surface analysis. For example, SIMS can be used to detect and analyze contaminants on a surface, analyze materials and devices to ensure the quality of specific products, and study atomic scale defects that may occur in the manufacturing of semiconductor chips or other materials. 

The Extrel MAX and MAX-LT™ Mass Spectrometer Systems have the performance and flexibility required for these applications. The MAX systems are the highest performance quadrupole analyzers available. Coupled with one of Extrel’s high transmission Energy Filters, the MAX systems furnish the high performance necessary for high accuracy surface analysis and depth profiling. The MAX-LT Systems offer the best price to performance ratio. Flange mounted Mass Spectrometers manufactured by Extrel allow the user to add Static and Dynamic SIMS capabilities to existing systems.


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 Extrel’s SIMS Products include:
  • Axial Energy Analyzer
  • Cross Beam Deflector Ionizer
  • MAX Flange Mounted Mass Spectrometers
  • MAX-LT Flange Mounted Mass Spectrometers
  • Tandem Ionizer Energy Filter - reduces signal to noise ratio
 Features of the MAX and MAX-LT Systems include:
  • High sensitivity to 10 mA/Torr
  • Partial pressure detectability to 10-16 mbar
  • Energy resolution down to 0.5 eV
  • Various mass ranges from 1-60 to 2 t-2000 amu
  • Axial and right angle configurations
  • Positive and negative ion detection

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